THS1 series is a basic pneumatic vibration isolator with bellows air springs,which is simple in design and provide basic isolation performance in both horizontal and vertical at low cost .
If higher level of repeatability is required, the precision leveling valve with repeatability of 0.05mm can be equipped with the vibration isolation system to shorten the settling time and ensure the stability of the platform. Standard leveling valve with repeatability of 1mm is also available.
THS1 pneumatic isolators incorporating the built-in oil damper can shorten the settling time of the equipment with linear stage, and increase the stiffness of the platform.
產品結構說明:
減振方式:氣動減振
固有頻率:垂直/水平=2.8-3.5Hz
10Hz減振率:70-90%
自動調整水平:是
調整水平重復性:
1、標準調整精度±0.1mm
2、高精度調整精度±0.05mm
產品用途:
面板設備、光學設備、檢測設備、半導體設備、醫療設備、航天軍工設備、精密運動平臺等。
Product Application
Panel equipment, Optical equipment, Testing equipment, Semi-conductor equipment,Medical Aerospace and military industry, Precision motion platform etc.